Vibrational Sensor Based on Fluid Damping Mechanisms

A piezoelectrically driven vibrating cantilever blade is damped by a number of mechanisms including viscous damping in a still fluid and aerodynamic damping in a flow. By measuring the damping of devices operating at resonance in the 1 to 5 kHz region, one can measure such properties as mass flow, absolute pressure or the product of molecualar mass and viscosity. In the case of the mass flow measurement, the device offers a mechanical alternative to hotwire and hot film devices for the automotive application.