Surface Micromachined Angular Rate Sensor

950538

02/01/1995

Event
International Congress & Exposition
Authors Abstract
Content
A surface micromachined angular rate sensor utilizing a vibrating metal ring structure on a silicon IC has been developed. Substantial signal conditioning circuitry is included on the IC with the vibrating structure. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.
Meta TagsDetails
DOI
https://doi.org/10.4271/950538
Pages
9
Citation
Johnson, J., Zarabadi, S., and Sparks, D., "Surface Micromachined Angular Rate Sensor," SAE Technical Paper 950538, 1995, https://doi.org/10.4271/950538.
Additional Details
Publisher
Published
Feb 1, 1995
Product Code
950538
Content Type
Technical Paper
Language
English