Silicon Microstructures: Merging Mechanics with Electronics

We review the advantages of silicon micromachining in manufacturing low-cost, high-volume, mechanical sensors. The characteristics of the technology are discussed and contrasted with those of typical milling operations. We describe the fabrication of simple mechanical elements to explain how micromachined parts can be manufactured in large numbers with a high degree of dimensional control. These parts are the key components of cost-effective, high performance pressure, flow, and acceleration sensors that are gradually penetrating the automotive market.