Shielded Gate Trench Technology for Achieving the Best Performing Automotive MOSFETs in Medium Voltage Applications

To meet the increasing demand for lower R_DS(ON) MOSFETs in medium voltage automotive applications, the shielded gate trench MOSFET architecture is becoming increasingly popular in recent years for its ability to achieve both lower R_DS(ON) and faster switching speed. The lower specific drain-to-source resistance (R_DS(ON).Area) translates into smaller chip size and consequently cheaper die cost for the end customers. Furthermore, shielded gate trench architecture offers smaller gate-to-drain capacitance by utilizing the shielding effect from the shield-poly, leading to lower G-D charge (Q_GD), faster switching speed, and increased dv/dt immunity. A comprehensive portfolio of medium voltage shielded gate power MOSFET products in several voltage classes (40V, 60V, 80V, and 100V) in automotive and industrial markets is presented in this paper. The latest generation shielded gate technologies have the industry leading performance with superior efficiency, better Figure-of-Merits (FOMs), and improved circuit performance, compared to the prior generations and the leading competitors in the market.