Research on a Multilayer Membrane Electrothermal Microdriver Based on MEMS Process

Based on the principle of the bimetallic effect of the electrothermal microdrive, polymer SU-eight glue is used as the functional material, nickel metal is used as the structural material, and copper metal is used as the sacrificial layer to make the electric heating microdrive. We process and manufacture them based on specific MEMS processes such as lithography, mask plating, and magnetron sputtering, and perform basic characterization, observation, and electrical signal analysis on the samples. The results show that the overall electrothermal micro-driver device is complete, the electrode and resistance wire structure is complete, and the I-V signal is normal.