Optimized Design of High-Q RF MEMS Resonator

A high-performance dual-ring RF MEMS breathing mode capacitive resonator is proposed, which achieves a 143.56% improvement in its quality factor (Q) through structural optimization. The structure of the resonator includes three main innovations: (1) reducing the anchor contact area to minimize the propagation loss of elastic waves, (2) optimizing anchor positioning to improve energy positioning, and (3) owning an inherent support structure that effectively avoids vibration energy coupling into the substrate. The design modifications were thoroughly investigated using COMSOL Multiphysics finite element simulations, and each method exhibited unique Q-value improvements through parameterized modeling of anchor loss contributions. In the design of MEMS resonators, these three methods are integrated synergistically into a resonator structure for the first time, preserving excellent breathing-mode operation while significantly suppressing energy dissipation mechanisms. The performance of the device has been further improved through a new differential amplification circuit that effectively mitigates feedthrough capacitance interference, representing a key achievement toward signal integrity in capacitive MEMS resonators. Computer analysis shows that the optimized resonator maintains constant oscillation characteristics while increasing the Q factor by 143.56% compared to traditional designs. The simulation results also demonstrate the generality of this method, indicating that it can be easily extended to MEMS resonators at other frequencies to enhance Q values. Targeted frequency response measurements confirm the effectiveness of structural modifications in suppressing anchor losses while maintaining mechanical stability. This work provides extensive design recommendations for high-Q MEMS resonator design, indicating that carefully optimizing a set of structural parameters can greatly improve performance. The provided method, validated through experimental finite element analysis of the system, is a resonator optimization model across MEMS structures. The 143.56% improvement in Q-value demonstrated in this work represents an important advancement in MEMS resonator technology, with potential applications in high-stability frequency generation and high-sensitivity quality detection.