Noise Analysis and Circuit Optimization for the Drive Loop of Resonant Accelerometers

Resonant MEMS accelerometers are core inertial devices in precision measurement fields such as inertial navigation, aerospace, and seismic monitoring, characterized by frequency signal output, strong anti-interference capability, and high-precision potential. With the growing demand for sub-microg-level measurement accuracy in high-end industrial and scientific applications, noise suppression and detection sensitivity optimization have become key research topics for resonant accelerometers. This paper conducts a systematic modeling study on resonant accelerometers, analyzes their mechanical structure and acceleration sensing mechanism based on the force-frequency effect of double-ended tuning forks, and establishes corresponding mathematical models. Non-ideal noise models of the mechanical structure and drive loop are constructed separately, and key noise source analysis identifies mechanical thermal noise and 1/f noise of the front-end charge amplifier as the main contributors to system noise. To solve these problems, a dedicated low-noise charge amplifier is designed for the drive loop. Simulation results show that the input-referred noise of the low-noise operational amplifier used in the charge amplifier reaches 18.804 nV/√Hz @ 50 kHz. When applied to the drive loop and verified through tape-out testing, the system achieves a phase noise better than -119.904 dBc/Hz @ 20 Hz offset from the resonant frequency, with a corresponding acceleration noise density of approximately 0.477 μg/√Hz @ 20 Hz.