New Uses of the Electron Microprobe Analyzer in Analysis of Integrated Circuits and Packages

This paper describes the use of the electron microprobe analyzer as an analytical tool for microelectronic devices. A comprehensive description of the construction and working of the electron microprobe analyzer is first presented. Included is a brief description of some of the basic physical laws regarding X-ray generation and analysis.

Three major innovations which have made the probe the tool for microelectronic analysis are described in detail; these are: the electron beam scanning system, secondary electron display, and high resolution nondispersive energy analysis.

Several examples are shown Of how these techniques may be applied to microelectronic analysis.