Micromachined Accelerometers for Inertial Navigation Applications
2005-01-1898
04/11/2005
- Event
- Content
- This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.
- Pages
- 8
- Citation
- Chae, J., Kulah, H., and Najafi, K., "Micromachined Accelerometers for Inertial Navigation Applications," SAE Technical Paper 2005-01-1898, 2005, https://doi.org/10.4271/2005-01-1898.