Micro-Cooler for Chip-Level Temperature Control

The objective of this paper is to design and fabricate a micro-cooler to provide integral cooling to electronics or Microelectromechanical Systems (MEMS) type components utilizing current MEMS technologies. A three-port capillary pumped loop (CPL) was analyzed and fabricated from silicon and quartz for this purpose. An analytical study of the device is presented in support of this design. This proves the feasibility of such a device, and thus the rationale for continuing its development.