The ^μ G ro ^™ : A Quartz MEMS Automotive Gyroscope

This paper describes technical design aspects of the most recent automotive MEMS gyroscope, known as the ^μGro^™ by Systron Donner Automotive Division (SDAD) of BEI Technologies, Inc. This gyro combines an unconventional quartz tuning fork sensing element design with surface mount packaging. The ASIC is capable of high automotive gyro performance using Digital Signal Processing (DSP) technology with extensive self-monitoring during gyro operation.