Flat Quartz Angular Rate Sensor Using Hammer-Headed Double-T Structure

2002-01-1077

03/04/2002

Event
SAE 2002 World Congress & Exhibition
Authors Abstract
Content
This paper report on a newly designed, flat, angular- rate sensor consisting of a Hammer Headed, Double-T Structure, vibrating element made from a single quartz crystal. Our optimized sensor's performance is highly reliable because the resonator uses the vibrations in only one plane of a monolithic quartz crystal that is highly stable under operating conditions, especially temperature changes. This sensor fulfills the stringent demands required for automobile electronic control systems.
The performance of the newly developed quartz, angular-rate sensor is highly reproducible by using one of the most stable materials known, the single quartz crystal. This is in contrast to polycrystalline materials such as ceramics or deposited polysilicon. The proposed structure can be manufactured in high volume and at low cost, which are requirements for automotive applications.
Meta TagsDetails
DOI
https://doi.org/10.4271/2002-01-1077
Pages
6
Citation
Kikuchi, T., Osugi, Y., Tani, M., Iwata, Y. et al., "Flat Quartz Angular Rate Sensor Using Hammer-Headed Double-T Structure," SAE Technical Paper 2002-01-1077, 2002, https://doi.org/10.4271/2002-01-1077.
Additional Details
Publisher
Published
Mar 4, 2002
Product Code
2002-01-1077
Content Type
Technical Paper
Language
English