Flat Quartz Angular Rate Sensor Using Hammer-Headed Double-T Structure

This paper report on a newly designed, flat, angular- rate sensor consisting of a Hammer Headed, Double-T Structure, vibrating element made from a single quartz crystal. Our optimized sensor's performance is highly reliable because the resonator uses the vibrations in only one plane of a monolithic quartz crystal that is highly stable under operating conditions, especially temperature changes. This sensor fulfills the stringent demands required for automobile electronic control systems.

The performance of the newly developed quartz, angular-rate sensor is highly reproducible by using one of the most stable materials known, the single quartz crystal. This is in contrast to polycrystalline materials such as ceramics or deposited polysilicon. The proposed structure can be manufactured in high volume and at low cost, which are requirements for automotive applications.