Exhaust Gas Oxygen Sensors Based on TiO ₂ Films

This paper discusses the properties of EGO sensors based on thick TiO₂ films. These devices are fabricated by depositing a TiO₂ film on an insulating or conducting substrate. In addition to being inherently inexpensive, planar techniques provide flexibility in the fabrication of multicomponent structures incorporating temperature compensation and heating elements. Furthermore, TiO₂ film sensors are found to possess faster transient response than available ZrO₂ and ceramic TiO₂ sensors. Results of engine studies of the properties of these new TiO₂sensors will be presented and discussed.