A Silicon Micromachined Gyroscope and Accelerometer for Vehicle Stability Control System

2004-01-1113

03/08/2004

Event
SAE 2004 World Congress & Exhibition
Authors Abstract
Content
A silicon micromachined gyroscope (angular rate sensor, yaw rate sensor) and accelerometer for vehicle stability control system is presented. The 5.1mm×4.7mm sensor chip is fabricated with a silicon micromachining process using a SOI (Silicon on Insulator) silicon wafer and a deep reactive ion etching. The sensor chip has a pair of resonators which are mechanically coupled and function as a tuning fork. The resonators are driven by electrostatic force and their movements are detected by capacitively sensing angstrom displacements. This sensor chip works not only as a gyroscope but also as an accelerometer with a single sensor chip.
The sensor unit consists of the sensor chip above, a signal processing IC, a microcomputer and an EEPROM. sigma-delta analog-to-digital conversion (sigma-delta ADC) is adopted to realize the digital calibration of sensor properties. Sigma-delta modulators on the signal processing IC convert the analog signals of angular rate, acceleration and temperature into oversampled 1-bit digital data. These data are transmitted to the microcomputer and converted into high-resolution, multi-bit digital data through the process of digital decimation filter. Sensor variation is calibrated by the microcomputer with the calibration data which has been stored in the EEPROM.
Meta TagsDetails
DOI
https://doi.org/10.4271/2004-01-1113
Pages
8
Citation
Nagao, M., Watanabe, H., Nakatani, E., Shirai, K. et al., "A Silicon Micromachined Gyroscope and Accelerometer for Vehicle Stability Control System," SAE Technical Paper 2004-01-1113, 2004, https://doi.org/10.4271/2004-01-1113.
Additional Details
Publisher
Published
Mar 8, 2004
Product Code
2004-01-1113
Content Type
Technical Paper
Language
English