A Nozzle-Integrated Flow Sensor for Common-Rail Injection Systems

We are the first to report about a micromachined flow sensor directly integrated in the Common Rail injection nozzle body between the double guidance and the tip of the nozzle. The thermal measurement principle is chosen, because it enables a very precise and fast detection of gaseous and liquid mass flows. Additionally, the velocity field in the nozzle is only slightly influenced by the integration of the sensor in the nozzle body due to the negligible height of the sensitive layer. For a hot film anemometer, a high pressure stable ceramic substrate can be used, fabricated in a low cost batch process. The technology, to fabricate the sensor, as well as the first flow measurements, carried out at a high pressure test set up, are presented.