Writing Circuit Patterns by Use of Scanning UV Lasers

Scanning ultraviolet (UV) lasers would be used to expose ultraviolet-sensitive photoresists to form patterns of conductors for electronic circuits, according to a proposal. Heretofore, such patterns have been formed by exposing photoresists to collimated ultraviolet or visible light through contact or proximity photomasks. The use of scanning lasers would make it unnecessary to make or use masks, and it would be amenable to rapid fabrication of prototype circuits.