Vibration-Dampening Pedestal for MEMS

Microelectromechanical systems (MEMS) are critical devices for various highly sensitive applications; however, the development and potential fielding of these next-generation smart systems is currently impeded by the inability to satisfy the stringent performance standards for precision and control. These advanced smart systems currently suffer from severe inaccuracies caused by a critical failure of a MEMS inertial measurement unit (IMU), i.e., the angular rate sensor (ARS).