Magazine Article

UV Lasers for MEMS & MOEMS Micro-Machining

TBMG-37172

01/01/2004

Abstract
Content

Controlled Ultraviolet (UV) laser ablation is a viable method of micro-machining micro-electro-mechanical systems (MEMS) and micro-optical-electro-mechanical systems (MOEMS). It enables users to capitalize on the strengths of UV laser processing in order to meet the ever-evolving challenges and promise of advancing technology.

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Citation
"UV Lasers for MEMS & MOEMS Micro-Machining," Mobility Engineering, January 1, 2004.
Additional Details
Publisher
Published
Jan 1, 2004
Product Code
TBMG-37172
Content Type
Magazine Article
Language
English