UV Lasers for MEMS & MOEMS Micro-Machining
TBMG-37172
01/01/2004
- Content
Controlled Ultraviolet (UV) laser ablation is a viable method of micro-machining micro-electro-mechanical systems (MEMS) and micro-optical-electro-mechanical systems (MOEMS). It enables users to capitalize on the strengths of UV laser processing in order to meet the ever-evolving challenges and promise of advancing technology.
- Citation
- "UV Lasers for MEMS & MOEMS Micro-Machining," Mobility Engineering, January 1, 2004.