Two-Axis Direct Fluid Shear Stress Sensor for Aerodynamic Applications

TBMG-9543

04/01/2011

Abstract
Content

This miniature or micro-sized semi-conductor sensor design provides direct, nonintrusive measurement of skin friction or wall shear stress in fluid flow situations in a two-axis configuration. The sensor is fabricated by microelectro-mechanical system (MEMS) technology, enabling small size and multiple, low-cost reproductions. The sensors may be fabricated by bonding a sensing element wafer to a fluid-coupling element wafer. Using this layered machine structure provides a truly three-dimensional device.

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Citation
"Two-Axis Direct Fluid Shear Stress Sensor for Aerodynamic Applications," Mobility Engineering, April 1, 2011.
Additional Details
Publisher
Published
Apr 1, 2011
Product Code
TBMG-9543
Content Type
Magazine Article
Language
English