Two-Axis Direct Fluid Shear Stress Sensor for Aerodynamic Applications
TBMG-9543
04/01/2011
- Content
This miniature or micro-sized semi-conductor sensor design provides direct, nonintrusive measurement of skin friction or wall shear stress in fluid flow situations in a two-axis configuration. The sensor is fabricated by microelectro-mechanical system (MEMS) technology, enabling small size and multiple, low-cost reproductions. The sensors may be fabricated by bonding a sensing element wafer to a fluid-coupling element wafer. Using this layered machine structure provides a truly three-dimensional device.
- Citation
- "Two-Axis Direct Fluid Shear Stress Sensor for Aerodynamic Applications," Mobility Engineering, April 1, 2011.