Magazine Article

Susceptor-Coating Materials for Growth of 4H-SiC

TBMG-6810

04/01/2000

Abstract
Content

Several materials have shown promise for coating graphite susceptors used in epitaxial growth of 4H-SiC. The development of appropriate susceptor-coating materials is an essential part of continuing efforts to produce high-quality, thick, undoped and lightly doped epilayers of 4H-SiC for use as semiconductors in future electronic devices that will operate at power levels and temperatures beyond the limits of Si- and GaAs-based devices.

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Citation
"Susceptor-Coating Materials for Growth of 4H-SiC," Mobility Engineering, April 1, 2000.
Additional Details
Publisher
Published
Apr 1, 2000
Product Code
TBMG-6810
Content Type
Magazine Article
Language
English