Surface Micromachining of Diamond for Fabrication of MEMS Microstructures

A surface-micromachining process has been devised for use in fabricating microscopic polycrystalline diamond structures (e.g., bridges and cantilevers) as integral parts of microelectromechanical systems (MEMS). The general concept of MEMS encompasses such diverse objects as simple mechanical actuators, simple mechanical sensors, or complex units containing electronic or optoelectronic circuitry integrated with mechanical sensors and/or actuators. Because diamond is highly resistant to corrosion and is transparent, the ability to form diamond structures could contribute to the development of MEMS to withstand corrosive environments. For example, diamond structures could serve as supports for corrosion-resistant electrodes in MEMS designed for biomedical applications. MEMS containing diamond films could also prove useful as automotive sensor and display devices.