Surface Micromachined Silicon Carbide Accelerometers

Surface micromachined silicon carbide accelerometers are undergoing development for eventual use in high-temperature environments like those inside turbines, internal-combustion engines, and other machines. These accelerometers would be used to measure vibrations indicative of deterioration of mechanical components; as such, they would be valuable diagnostic tools that could give advance warnings of failures or for the need to perform maintenance. They would even be small enough to fit into turbine blades.