Software Models Processes in a Gaseous Chemical Reactor
TBMG-32187
06/01/1998
- Content
The Simple Analysis of Materials Processing Reactors (SAMPR) computer code is meant for the analysis of plasma and nonplasma processes used in manufacturing semiconductors. The code can also be used to analyze any chemical-processing reactor with gaseous (but not liquid) streams.
- Citation
- "Software Models Processes in a Gaseous Chemical Reactor," Mobility Engineering, June 1, 1998.