Snapshot SEM Imaging of Moving MEMS Structures
TBMG-29618
5/1/2001
- Content
A stroboscopic scanning electron microscope (SEM) has been proposed as a means of generating still or slow-motion pictures of moving structures in microelectromechanical systems (MEMS). Such imaging is used in characterizing the dynamics of MEMS; characterization of the dynamics is a critical component of the MEMS development cycle.
- Citation
- "Snapshot SEM Imaging of Moving MEMS Structures," Mobility Engineering, May 1, 2001.