Magazine Article

Slot-Antenna/ Permanent-Magnet Device for Generating Plasma

TBMG-2023

07/01/2007

Abstract
Content

A device that includes a rectangular-waveguide / slot-antenna structure and permanent magnets has been devised as a means of generating a substantially uniform plasma over a relatively large area, using relatively low input power and a low gas flow rate. The device utilizes electron cyclotron resonance (ECR) excited by microwave power to efficiently generate plasma in a manner that is completely electrode-less in the sense that, in principle, there is no electrical contact between the plasma and the antenna. Plasmas generated by devices like this one are suitable for use as sources of ions and/or electrons for diverse material-processing applications (e.g., etching or deposition) and for ion thrusters.

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Citation
"Slot-Antenna/ Permanent-Magnet Device for Generating Plasma," Mobility Engineering, July 1, 2007.
Additional Details
Publisher
Published
Jul 1, 2007
Product Code
TBMG-2023
Content Type
Magazine Article
Language
English