Simulation of MEMS Piezoelectric Micropump for Biomedical Applications

Since the advent of Micro Electro Mechanical Systems (MEMS) technology, microfabrication methods have been used to manufacture a wide range of miniature pumps. These micropumps find their greatest use in chemical and biomedical applications requiring the transport of small, accurately measured liquid quantities. When utilized in chemical applications, micropumps are often a component of a lab-on-a-chip device. Such devices are envisioned as providing for reasonably inexpensive, possibly even disposable, means to conduct laboratory experiments.