Scanning Probe Position Encoder Yields Subnanometer Precision

In today's manufacturing world, the need for ultraprecise position measurement and control grows as feature sizes shrink in the semiconductor industry and the world of microelectromechanical systems (MEMS) impinges on conventional manufacturing. Now NanoWave, a startup company with roots at MIT, has announced that its subnanometer precision measurement technology is ready for licensing and commercialization.