Magazine Article

Real-Time Deposition Monitor for Ultrathin Conductive Films

TBMG-9883

05/01/2011

Abstract
Content

A device has been developed that can be used for the real-time monitoring of ultrathin (2 Å or more) conductive films. The device responds in less than two microseconds, and can be used to monitor film depositions up to about 60 Å thick. Actual thickness monitoring capability will vary based on properties of the film being deposited. This is a single-use device, which, due to the very low device cost, can be disposable.

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Citation
"Real-Time Deposition Monitor for Ultrathin Conductive Films," Mobility Engineering, May 1, 2011.
Additional Details
Publisher
Published
May 1, 2011
Product Code
TBMG-9883
Content Type
Magazine Article
Language
English