Real-Time Deposition Monitor for Ultrathin Conductive Films

A device has been developed that can be used for the real-time monitoring of ultrathin (2 Å or more) conductive films. The device responds in less than two microseconds, and can be used to monitor film depositions up to about 60 Å thick. Actual thickness monitoring capability will vary based on properties of the film being deposited. This is a single-use device, which, due to the very low device cost, can be disposable.