Quality Control Method for a Micro-Nano-Channel Microfabricated Device

A variety of silicon-fabricated devices is used in medical applications such as drug and cell delivery, and DNA and protein separation and analysis. In applications such as drug delivery from implantable devices, the silicon device structure must have superior precision. In particular, the nano-channel size in implantable drug delivery membranes strongly determines the drug release from the implanted reservoir. An accidental difference in the nano size may translate into ineffective medical treatment or dangerous overdosing.