Protecting Sensitive Instruments with Piezo-Driven Active Vibration Isolation Platforms

As the need for nano precision has become increasingly important in many fields of research and manufacturing — such as microelectronics fabrication, laser/optical system applications, life sciences, materials, and biological research — so has the need to develop better vibration isolation technology to facilitate instrumentation operation under extremely precise requirements. Once the mainstay for stabilizing academia's and industry's most critical micro-engineering instrumentation, passive pneumatic vibration isolation has proved less than adequate in isolating extremely low-frequency vibration that negatively influences instrumentation operating at atomic-scale resolutions.