Protecting a Micromachined Accelerometer During Handling

A highly sensitive micromachined accelerometer that is intended to be exposed to very small accelerations during operation incorporates features for protection against much larger accelerations during handling and transport. More specifically, the accelerometer is designed to measure acceleration as small as 10 -8× that of normal Earth gravitation (g), yet can withstand accelerations as large as 200 g when the protective function is activated.