Programmable Aperture With MEMS Microshutter Arrays

TBMG-11370

10/01/2011

Abstract
Content

A microshutter array (MSA) has been developed for use as an aperture array for multi-object selections in James Webb Space Telescope (JWST) technology. Light shields, molybdenum nitride (MoN) coating on shutters, and aluminum/ aluminum oxide coatings on interior walls are put on each shutter for light leak prevention, and to enhance optical contrast. Individual shutters are patterned with a torsion flexure that permits shutters to open 90° with a minimized mechanical stress concentration. The shutters are actuated magnetically, latched, and addressed electrostatically. Also, micromechanical features are tailored onto individual shutters to prevent stiction.

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Citation
"Programmable Aperture With MEMS Microshutter Arrays," Mobility Engineering, October 1, 2011.
Additional Details
Publisher
Published
Oct 1, 2011
Product Code
TBMG-11370
Content Type
Magazine Article
Language
English