Process for Fabrication of Micro Fluidic Structures

Through an innovative microfabrication process, enclosed microstructures are created for "laboratory on a chip" applications, such as medical diagnostics. These microstructures include capillaries, tunnels, pipettes, reaction vessels, and cavities. Using only conventional lithographic techniques, curved as well as straight structures ranging in size down to 1 micron can be produced on a single-crystal silicon wafer.