Principles of Laser Scanning Confocal Microscopes

Today’s high-resolution laser scanning confocal microscopes (LSCM), also referred to simply as laser scanning microscopes, are powerful high-magnification surface metrology instruments with a vast application range, from simple metal surfaces to high-end electronic components. Software capabilities make this possible by taking high-resolution surface images and producing accurate, repeatable nanometer measurements. This article will discuss the basic functions of a laser scanning microscope, as well as the software capabilities that enable manipulation of the imaging aspects after hardware acquisition.