Patterning of Indium Tin Oxide Films

TBMG-2552

01/01/2008

Abstract
Content

A relatively rapid, economical process has been devised for patterning a thin film of indium tin oxide (ITO) that has been deposited on a polyester film. ITO is a transparent, electrically conductive substance made from a mixture of indium oxide and tin oxide that is commonly used in touch panels, liquid-crystal and plasma display devices, gas sensors, and solar photovoltaic panels. In a typical application, the ITO film must be patterned to form electrodes, current collectors, and the like. Heretofore it has been common practice to pattern an ITO film by means of either a laser ablation process or a photolithography/etching process. The laser ablation process includes the use of expensive equipment to precisely position and focus a laser. The photolithography/etching process is time-consuming.

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Citation
"Patterning of Indium Tin Oxide Films," Mobility Engineering, January 1, 2008.
Additional Details
Publisher
Published
Jan 1, 2008
Product Code
TBMG-2552
Content Type
Magazine Article
Language
English