Magazine Article

Parallel-Beam Interferometry With Incoherent Light

TBMG-29667

09/01/2000

Abstract
Content

A technique of parallel-beam interferometry with spatially incoherent light has been proposed to solve two problems that arise in conjunction with using interferometry to measure the shape of a surface. The first problem is how to obtain spatial resolution in excess of the diffraction limit; the second problem is how to measure the variation in the shape of an object with temperature.

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Citation
"Parallel-Beam Interferometry With Incoherent Light," Mobility Engineering, September 1, 2000.
Additional Details
Publisher
Published
Sep 1, 2000
Product Code
TBMG-29667
Content Type
Magazine Article
Language
English