Parallel-Beam Interferometry With Incoherent Light
TBMG-29667
09/01/2000
- Content
A technique of parallel-beam interferometry with spatially incoherent light has been proposed to solve two problems that arise in conjunction with using interferometry to measure the shape of a surface. The first problem is how to obtain spatial resolution in excess of the diffraction limit; the second problem is how to measure the variation in the shape of an object with temperature.
- Citation
- "Parallel-Beam Interferometry With Incoherent Light," Mobility Engineering, September 1, 2000.