Optical Processing Furnace
TBMG-32024
04/01/1998
- Content
NREL scientists have developed an optical processing furnace that combines photonic effects of light with heat to selectively induce reactions at far lower temperatures than they would be if caused by heat alone. In addition to saving energy for standard processing steps and producing devices with higher ohmic quality, this makes possible such new processes as:
- Citation
- "Optical Processing Furnace," Mobility Engineering, April 1, 1998.