Normally Closed, Piezoelectrically Actuated Microvalve

A normally closed, piezoelectrically actuated microvalve is being developed as a prototype of valves in microfluidic systems and other microelectromechanical systems (MEMS) intended for operation in outer space. Terrestrial MEMS in which such valves could also prove useful include implantable pumps to administer precisely metered medications, controllers for tightly regulating flows of chemicals in semiconductor-manufacturing processes, and flow controllers for environmental and biological monitoring systems.