Nonevaporable Getters To Maintain Vacuum in Sealed MEMS
TBMG-6743
02/01/2000
- Content
Nonevaporable getters have been proposed for use in maintaining vacuum inside hermetically sealed microelectromechanical systems (MEMS) that rely on vacuum for proper operation. A vibratory microgyroscope is an example of such a MEMS. The proposed getters could also be used in such vacuum components as cathode-ray tubes, microwave tubes, conventional electron tubes, plasma display devices, particle accelerators and colliders, vacuum thermal insulation, ultrahigh-vacuum systems for processing semiconductors, x-ray tubes, lamps, and field-emission display devices.
- Citation
- "Nonevaporable Getters To Maintain Vacuum in Sealed MEMS," Mobility Engineering, February 1, 2000.