Nonevaporable Getters To Maintain Vacuum in Sealed MEMS

Nonevaporable getters have been proposed for use in maintaining vacuum inside hermetically sealed microelectromechanical systems (MEMS) that rely on vacuum for proper operation. A vibratory microgyroscope is an example of such a MEMS. The proposed getters could also be used in such vacuum components as cathode-ray tubes, microwave tubes, conventional electron tubes, plasma display devices, particle accelerators and colliders, vacuum thermal insulation, ultrahigh-vacuum systems for processing semiconductors, x-ray tubes, lamps, and field-emission display devices.