Magazine Article

Nonevaporable Getters To Maintain Vacuum in Sealed MEMS

TBMG-6743

02/01/2000

Abstract
Content

Nonevaporable getters have been proposed for use in maintaining vacuum inside hermetically sealed microelectromechanical systems (MEMS) that rely on vacuum for proper operation. A vibratory microgyroscope is an example of such a MEMS. The proposed getters could also be used in such vacuum components as cathode-ray tubes, microwave tubes, conventional electron tubes, plasma display devices, particle accelerators and colliders, vacuum thermal insulation, ultrahigh-vacuum systems for processing semiconductors, x-ray tubes, lamps, and field-emission display devices.

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Citation
"Nonevaporable Getters To Maintain Vacuum in Sealed MEMS," Mobility Engineering, February 1, 2000.
Additional Details
Publisher
Published
Feb 1, 2000
Product Code
TBMG-6743
Content Type
Magazine Article
Language
English