TBMG-32220: Nitrogen-Beam Source for Deposition of III/V Nitrides - Magazine Article

Abstract

Content: A nitrogen-beam source has been developed to significantly improve the synthesis of wide-band-gap nitrides.

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Topics: Fabrication
Research and development
Chemicals

Details

Citation: "Nitrogen-Beam Source for Deposition of III/V Nitrides," Mobility Engineering, March 1, 1998.

Additional Details

Publisher: Tech Briefs Media Group

Published: 3/1/1998

Product Code: TBMG-32220

Content Type: Magazine Article

Language: English