Nanopatterning of Inorganic and Polymeric Substrates by Indentation Lithography

TBMG-9435

03/01/2011

Abstract
Content

A recent collaboration between the Whitesides Group at Harvard University and CSM Instruments has culminated in an important advance in lithography of different materials at the nano scale. The motivation for this

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Citation
"Nanopatterning of Inorganic and Polymeric Substrates by Indentation Lithography," Mobility Engineering, March 1, 2011.
Additional Details
Publisher
Published
Mar 1, 2011
Product Code
TBMG-9435
Content Type
Magazine Article
Language
English