Miniature Turbomolecular Pump for High Vacuum
TBMG-29811
08/01/1999
- Content
A proposed miniature turbomolecular pump would be a prototype of high-vacuum sources for a forthcoming generation of miniature, portable mass spectrometers and other scientific instruments. The miniature turbomolecular pump would be an attractive alternative to currently available high-vacuum sources (including most commercial off-the-shelf turbomolecular pumps), which are too bulky and power-hungry to be practical for use in portable instruments.
- Citation
- "Miniature Turbomolecular Pump for High Vacuum," Mobility Engineering, August 1, 1999.