Miniature Turbomolecular Pump for High Vacuum

TBMG-29811

8/1/1999

Abstract
Content

A proposed miniature turbomolecular pump would be a prototype of high-vacuum sources for a forthcoming generation of miniature, portable mass spectrometers and other scientific instruments. The miniature turbomolecular pump would be an attractive alternative to currently available high-vacuum sources (including most commercial off-the-shelf turbomolecular pumps), which are too bulky and power-hungry to be practical for use in portable instruments.

Meta TagsDetails
Citation
"Miniature Turbomolecular Pump for High Vacuum," Mobility Engineering, August 1, 1999.
Additional Details
Publisher
Published
8/1/1999
Product Code
TBMG-29811
Content Type
Magazine Article
Language
English