Miniature Ring-Orbitron Getter Ion Vacuum Pumps
TBMG-30094
9/1/1999
- Content
Miniature ring-orbitron getter ion pumps have been proposed for supplying high vacuums to advanced scientific instruments expected to be developed in the next few years. Examples of such instruments include electron microscopes, ion mass spectrometers, and instruments based on electron probes.
- Citation
- "Miniature Ring-Orbitron Getter Ion Vacuum Pumps," Mobility Engineering, September 1, 1999.