Microscopic Heat Exchangers, Valves, Pumps, and Flowmeters

Microscopic forced-flow heat-transfer systems containing heat exchangers, flow channels, electrostatically driven peristaltic pumps, and related components have been proposed. These systems would be made largely of silicon, by use of micromachining processes similar or identical to those used to make integrated circuits. These microscopic heat-transfer systems could thus be made as integral parts of integrated circuits: For example, charge-coupled-device (CCD) imaging circuits in infrared cameras could be cooled very effectively by incorporating such systems to circulate cryogenic fluids within the CCD substrates.