Micromachined Slits for Imaging Spectrometers
TBMG-2860
06/01/2008
- Content
Slits for imaging spectrometers can now be fabricated to a precision much greater than previously attainable. What makes this possible is a micromachining process that involves the use of microlithographic techniques. This micromachining process supplants a prior machine-shop process.
- Citation
- "Micromachined Slits for Imaging Spectrometers," Mobility Engineering, June 1, 2008.