Micromachined Force-Balance Anemometer

A micromachined force-balance anemometer has been developed by modifying the design of a micromachined force-balance accelerometer that responds to accelerations as small as 109 × normal Earth gravitation (about 10 - 8 m/s2). The anemometer thus offers the advantages of the accelerometer; namely, high sensitivity, wide dynamic range, bipolar response, athermality, robustness, compactness, and low power consumption.