Micromachined Double Resonator
TBMG-7335
5/1/2001
- Content
A double-resonator design has been devised for a cloverleaf-shaped silicon microelectromechanical resonator. The double-resonator design provides for an inner, higher-frequency resonator suspended on an outer, lower-frequency resonator. This design concept affords several advantages, as described below.
- Citation
- "Micromachined Double Resonator," Mobility Engineering, May 1, 2001.