Micromachined Broad Band Light Sources

A novel micromachined incandescent light source has been designed and fabricated to operate at temperatures exceeding 2,500 K. The high-temperature, tungsten filament-based source has a high-brightness, broad spectral band emission. The monolithic design allows for ease of incorporation with on-chip electronics as well as with fiber optics. Previously micromachined incandescent lamps contained, variously, tungsten or polycrystalline silicon filaments that glowed more dimly because they could only be operated at temperatures between 900 and 1,200 °C. The present devices can be used either in a single (discrete device) or two-dimensional array format for miniature spectroscopic instruments and for automotive dashboard displays.