Microelectromechanical System (MEMS) Switch Test

Analyzing microelectromechanical system (MEMS) switch behavior is a new field of study that guides the production of MEMS switches. One issue of primary importance is the degradation of contact resistance over the lifetime of the device, and whether small variations in the resistance initially can be prognostically used to predict future performance. Unfortunately, commercially available equipment is limited by its data collection rate, and is not a realistic option to examine every cycle of a switch expected to potentially survive for several trillion cycles. In addition, these tests must be performed on tens to hundreds of switches, necessitating the need for a parallel measurement solution.