Microelectromechanical SPDT Switches

Microelectromechanical single-pole, double-throw (SPDT) switches with predominantly planar configurations have been proposed for use in radio-frequency (RF) circuits. These switches would have overall dimensions of the order of a few millimeters and would be fabricated by micromachining techniques compatible with those used to fabricate microelectronic circuits; as such, these switches would be attractive for incorporation into inexpensive, highly integrated electronic circuits. Moreover, because of their fundamentally electromechanical character and in contradistinction to semiconductor switches, these switches are expected to exhibit minimal intermodulation distortion and very low power dissipation.